Drive unit

ABSTRACT

A drive unit includes a control unit for controlling an ultrasonic actuator. The control unit performs switching between a normal operation mode in which the piezoelectric element unit vibrates at a frequency close to a resonance frequency of longitudinal vibration in the lengthwise direction of the piezoelectric element unit and a resonance frequency of bending vibration to let the ultrasonic actuator output a driving force and a heating mode in which the piezoelectric element unit vibrates at a frequency close to a resonance frequency of longitudinal vibration in the thickness direction of the piezoelectric element unit to heat the piezoelectric element.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a drive unit including a vibrationactuator using a piezoelectric element.

2. Description of Related Art

A drive unit including a vibration actuator using a piezoelectricelement is known (cf., Japanese Unexamined Patent Publication No.2004-304963) and used in ultrasonic motors and devices which make smallstep-by-step displacement.

The vibration actuator is placed between a stationary body and a movablebody arranged movably relative to the stationary body. Specifically, thevibration actuator is fixed to one of the stationary and movable bodieswith part thereof (e.g., a driver element) outputting a driving force intouch with the other one of the stationary and movable bodies(hereinafter may be referred to as a touched body). When the drive unitapplies an electric field to the piezoelectric element of the vibrationactuator in this state, the piezoelectric element is displaced due toits piezoelectric characteristic and the vibration actuator makesvibration (e.g., longitudinal vibration and bending vibration). As aresult, the movable body is moved in a predetermined direction byfriction caused between the vibration actuator and the touched body.

SUMMARY OF THE INVENTION

According to the structure in which the driving force from the vibrationactuator is transmitted to the touched body through the friction, thefriction is reduced if a monolayer of water is formed on a contactsurface between the vibration actuator and the touched body. As aresult, the displacement of the vibration actuator is less likely to betransmitted to the touched body. In a worst case, the vibration actuatormay slip and the movable body does not move.

An object of the present invention is to provide a drive unit which doesnot malfunction even in an environment where condensation is likely tooccur.

The drive unit of the present invention is configured to drive thevibration actuator at a frequency different from a frequency duringnormal operation and at which the piezoelectric element is heated suchthat the condensation is removed.

To be more specific, the present invention is directed to a drive unitincluding a vibration actuator using a piezoelectric element. The driveunit further includes a control section for controlling the vibrationactuator switchably between a normal operation mode in which thepiezoelectric element vibrates at a predetermined frequency to let thevibration actuator output a driving force, and a heating mode in whichthe piezoelectric element vibrates at a frequency different from thefrequency in the normal operation mode to heat the piezoelectricelement.

According to the present invention, in the heating mode, the controlsection allows the piezoelectric element to vibrate at a frequencydifferent from the frequency in the normal operation mode such that thepiezoelectric element is heated. Therefore, condensation that may occuron the ultrasonic actuator is removed by heat generated by thepiezoelectric element.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic front view illustrating the schematic structure ofa drive unit according to Embodiment 1 of the present invention.

FIG. 2 is a perspective view of the drive unit.

FIG. 3 is a perspective view of an ultrasonic actuator.

FIG. 4 is an exploded perspective view of a piezoelectric element unit.

FIG. 5 is a schematic front view illustrating the schematic structure ofan actuator body.

FIG. 6 is a conceptual diagram illustrating the displacement of theactuator body in the first mode of longitudinal vibration.

FIG. 7 is a conceptual diagram illustrating the displacement of theactuator body in the second mode of bending vibration.

FIGS. 8A to 8D are conceptual diagrams illustrating the movement of theactuator body.

FIG. 9 is a block diagram illustrating the structure of a control unit.

FIG. 10 is an equivalent circuit diagram of a piezoelectric element.

FIG. 11 is a graph illustrating relationship between driving frequencyand impedance of the actuator body.

FIG. 12 is a graph illustrating relationship between driving frequencyof the actuator body and current.

FIGS. 13A to 13C are conceptual diagrams illustrating how a stage isdriven by the ultrasonic actuator. FIG. 13A shows the stage not drivenyet, FIG. 13B shows the stage driven by one of driver elements as theactuator body stretches in the lengthwise direction and FIG. 13C showsthe stage driven by the other driver element as the actuator bodycontracts in the lengthwise direction.

FIG. 14 is a perspective view of another embodiment of an ultrasonicactuator.

FIG. 15 is a perspective view of another embodiment of a drive unit.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, embodiments of the present invention will be described withreference to the drawings.

Embodiment 1

A drive unit 1 according to Embodiment 1 of the invention includes, asshown in FIGS. 1 and 2, a stage 11, an ultrasonic actuator 2, a controlunit 7 for controlling and driving the ultrasonic actuator 2, atemperature sensor 81 for detecting the temperature of the ultrasonicactuator 2, a condensation sensor 82 for detecting whether or notcondensation has occurred on the ultrasonic actuator 2 and a positiondetection sensor 83 for detecting the present position of the stage 11.

The stage 11 is slidably attached to rails 12 fixed in parallel witheach other to a base (not shown) as a stationary body. That is, thestage 11 is movable in the extending direction of the rails 12 (theextending direction of the rails 12 is the moving direction of the stage11). The stage 11 is a plate-like member and substantially square-shapedwhen viewed in plan. The ultrasonic actuator 2 is arranged such thatdriver elements 49 described later come into contact with the rearsurface of the stage 11 (the surface on which the rails 12 areprovided).

The ultrasonic actuator 2 includes, as shown in FIG. 3, an actuator body4 which generates vibration, driver elements 49 for transmitting thedriving force of the actuator body 4 to the stage 11, a case 5 forcontaining the actuator body 4, support rubbers 61 interposed betweenthe actuator body 4 and the case 5 to elastically support the actuatorbody 4, and a bias rubber 62 for biasing the actuator body 4 to thestage 11. The ultrasonic actuator 2 functions as a vibration actuator.

The actuator body 4 comprises a piezoelectric element unit 40.

The piezoelectric element unit 40 is substantially in the form of arectangular parallelepiped and has a pair of substantially rectangularprinciple surfaces facing each other, a pair of long side surfacesfacing each other and extending in the lengthwise direction of theprinciple surfaces to be orthogonal to the principle surfaces and a pairof short side surfaces facing each other and extending in the widthwisedirection of the principle surfaces to be orthogonal to both of theprinciple surfaces and the long side surfaces.

As shown in FIG. 4, the piezoelectric element unit 40 is provided byalternately stacking five piezoelectric layers (piezoelectric elements)41 and four internal electrode layers 42, 44, 43 and 44. Specifically,the internal electrode layers 42, 44, 43 and 44 are a first feedingelectrode layer 42, a common electrode layer 44, a second feedingelectrode layer 43 and a common electrode layer 44 stacked in this orderalternately with the piezoelectric layers 41. The first feedingelectrode layer 42, the second feeding electrode layer 43 and the commonelectrode layers 44 are printed on the principle surfaces of thepiezoelectric layers 41, respectively.

Each of the piezoelectric layers 41 is an insulating layer made ofceramic such as lead zirconate titanate. Just like the piezoelectricelement unit 40, the piezoelectric layer 41 is substantially in the formof a rectangular parallelepiped and has a pair of principle surfaces, apair of long side surfaces and a pair of short side surfaces. Each ofthe piezoelectric layers 41 is provided with an external electrode 45 aformed in the middle of one of the long side surfaces in the lengthwisedirection, an external electrode 46 a formed in the middle of one of theshort side surfaces in the widthwise direction and an external electrode47 a formed in the middle of the other short side surface in thewidthwise direction.

Each of the common electrode layers 44 is substantially rectangular andcovers almost all the principle surface of the piezoelectric layer 41.The common electrode layer 44 has a lead electrode 44 a extending fromthe middle of one of the long sides of the common electrode layer 44 inthe lengthwise direction to the external electrode 45 a of thepiezoelectric layer 41.

Suppose that the principle surface of the piezoelectric layer 41 isdivided into quadrants, i.e., two areas in the lengthwise direction andtwo areas in the widthwise direction. The first feeding electrode layer42 includes a pair of first electrodes 42 a and 42 b respectively formedon one of the pairs of diagonally aligned areas of the principle surfaceof the corresponding piezoelectric layer 41. A conductive electrode 42 cconnects the first electrodes 42 a and 42 b to bring them intoconduction as shown in FIG. 5. The first electrodes 42 a and 42 b areeach a substantially rectangular electrode that overlaps the commonelectrode layer 44 when viewed in the stacking direction. That is, thefirst electrode 42 a (42 b) is opposed to the common electrode layer 44with the piezoelectric layer 41 interposed therebetween. One of thefirst electrodes 42 a and 42 b, i.e., the first electrode 42 a, isprovided with a lead electrode 42 d extending to the external electrode46 a of the piezoelectric layer 41.

The second feeding electrode layer 43 includes a pair of secondelectrodes 43 a and 43 b respectively formed on the other pair ofdiagonally aligned areas of the piezoelectric surface of thecorresponding piezoelectric layer 41. A conductive electrode 43 cconnects the second electrodes 43 a and 43 b to bring them intoconduction. As viewed in the stacking direction representedschematically in FIG. 5, the second electrode 43 a is provided to beadjacent to the first electrode 42 a in the widthwise direction andadjacent to the first electrode 42 b in the lengthwise direction.Similarly, the second electrode 43 b is provided to be adjacent to thefirst electrode 42 a in the lengthwise direction and adjacent to thefirst electrode 42 b in the widthwise direction. The second electrodes43 a and 43 b are each a substantially rectangular electrode thatoverlaps the common electrode layer 44 when viewed in the stackingdirection. That is, the second electrode 43 a (43 b) is opposed to thecommon electrode layer 44 with the piezoelectric layer 41 interposedtherebetween. One of the second electrodes 43 a and 43 b, i.e., thesecond electrode 43 b, is provided with a lead electrode 43 d extendingto the external electrode 47 a of the piezoelectric layer 41.

In the piezoelectric element unit 40 provided by alternately stackingthe piezoelectric layers 41 and the internal electrode layers 42, 44, 43and 44, the external electrodes 45 a of the piezoelectric layers 41 arealigned in the stacking direction in the middle of one of the long sidesurfaces of the piezoelectric element unit 40 in the lengthwisedirection to function as a single external electrode 45. The leadelectrodes 44 a of the common electrode layers 44 are electricallyconnected to the external electrode 45. Likewise, the externalelectrodes 46 a of the piezoelectric layers 41 are aligned in thestacking direction in the middle of one of the short side surfaces ofthe piezoelectric element unit 40 in the widthwise direction to functionas a single external electrode 46. The lead electrode 42 d of the firstfeeding electrode layer 42 is electrically connected to the externalelectrode 46. Further, the external electrodes 47 a of the piezoelectriclayers 41 are aligned in the stacking direction in the middle of theother short side surface of the piezoelectric element unit 40 in thewidthwise direction to function as a single external electrode 47. Thelead electrode 43 d of the second feeding electrode layer 43 iselectrically connected to the external electrode 47.

On the other long side surface of the piezoelectric element unit 40,i.e., the long side surface where the external electrodes 45 a are notformed, the driver elements 49 are arranged at an interval from eachother in the lengthwise direction. The driver elements 49 are arrangedat positions inside from the ends of the long side surface in thelengthwise direction by 30 to 35% of the total length of the long sidesurface. The positions are the antinodes of the second mode of bendingvibration of the piezoelectric element unit 40 described later, i.e.,positions at which the maximum vibration occurs. The driver elements 49are preferably columnar elements, at least part of which in contact withthe stage 11 has a circular section (specifically, a combination of acolumnar element having a semicircle section and a columnar elementhaving a rectangular section), and made of hard material such asceramic. The driver elements 49 are arranged such that the lengthwisedirection of the driver elements 49 is parallel to the thicknessdirection of the piezoelectric element unit 40 and the center of thedriver elements 49 in the lengthwise direction is aligned with thecenter of the piezoelectric element unit 40 in the thickness direction.

With the external electrode 45 connected to electrical ground, an ACvoltage of a predetermined frequency is applied to the externalelectrode 46, while an AC voltage having a phase shifted by 90° relativeto that of the former AC voltage is applied to the external electrode47. Accordingly, the AC voltage is applied to the pair of firstelectrodes 42 a and 42 b arranged along the diagonal line of theprinciple surface of the piezoelectric layer 41 and the AC voltagehaving a phase shifted by 90° from that of the former AC voltage isapplied to the pair of second electrodes 43 a and 43 b arranged alongthe other diagonal line of the principle surface of the piezoelectriclayer 41. This induces longitudinal vibration in the lengthwisedirection (so-called stretching vibration) and bending vibration in thewidthwise direction (so-called transverse vibration) of thepiezoelectric element unit 40, i.e., the actuator body 4.

Resonance frequencies of the longitudinal vibration and the bendingvibration are determined by the material and the shape of the actuatorbody 4, i.e., those of the piezoelectric element unit 40. The resonancefrequencies are also varied depending on the force supporting theactuator body 4 and positions at which the actuator body 4 is supported.With these facts in mind, the resonance frequencies are adjusted so asto be substantially equal and AC voltages having a frequency close tothe adjusted resonance frequency are applied to the external electrodes46 and 47, respectively, while the phases of the AC voltages are shiftedfrom each other by 90°. For example, if the shape of the piezoelectricelement unit 40 is designed such that the first mode of longitudinalvibration (see FIG. 6) and the second mode of bending vibration (seeFIG. 7) have the same resonance frequency and the AC voltages having afrequency close to the resonance frequency are applied with their phasesshifted from each other by 90° as described above, the first mode oflongitudinal vibration and the second mode of bending vibration occur inharmony in the piezoelectric element unit 40. Thus, the shape of thepiezoelectric element unit 40 is varied in the order shown in FIGS. 8Ato 8D.

As a result, the driver elements 49 of the piezoelectric element unit 40make a substantially elliptical motion, i.e., circular motion, on aplane parallel to the principle surface of the piezoelectric elementunit 40, i.e., a plane including the lengthwise direction and thewidthwise direction (a plane parallel to the page surface in FIG. 8).

The case 5 is made of a resin and substantially in the form of arectangular parallelepiped box corresponding to the shape of thepiezoelectric element unit 40. The case 5 has a substantiallyrectangular main wall 51 parallel to the principle surface of thepiezoelectric element unit 40, a first short side wall 52 provided onone short side of the main wall 51 at one end of the main wall 51 in thelengthwise direction (the left short side in FIG. 3), a second shortside wall 53 provided on the other short side of the main wall 51 at theother end of the main wall 51 in the lengthwise direction (the rightshort side in FIG. 3), and a long side wall 54 provided on one long sideof the main wall 51 at one end of the main wall 51 in the widthwisedirection (the lower long side in FIG. 3). Specifically, the case 5 doesnot have a wall opposite the main wall 51 and a wall on the other longside of the main wall 51 at the other end of the main wall 51 in thewidthwise direction (the upper long side of FIG. 3), i.e., a wallcorresponding to the long side surface of the piezoelectric element unit40 on which the driver elements 49 are formed. The case 5 is opened at aplane perpendicular to the stacking direction of the piezoelectricelement unit 40 (normal direction of the main wall 51) and a plane atthe other end of the main wall in the widthwise direction.

The actuator body 4 is contained in the thus-configured case 5. Theactuator body 4 is placed in the case 5 such that one of the principlesurfaces of the piezoelectric element unit 40 faces the main wall 51 andone of the long side surfaces of the piezoelectric element unit 40 (thelong side surface on which the external electrode 45 is formed) facesthe long side wall 54. The driver elements 49 protrude from the case 5toward the other end in the widthwise direction. One of the supportrubbers 61 is interposed between one of the short side surfaces of thepiezoelectric element unit 40 and the first short side wall 52 of thecase 5 and the other support rubber 61 is interposed between the othershort side surface of the piezoelectric element unit 40 and the secondshort side wall 53 of the case 5. The short side surfaces of thepiezoelectric element unit 40 are antinodes of the longitudinalvibration. Since the support rubbers 61 are elastic bodies, they cansupport the piezoelectric element unit 40 without hindering thelongitudinal vibration of the piezoelectric element unit 40. The supportrubbers 61 are in contact with not only the actuator body 4 and thefirst and second short side walls 52 and 53 but also the inner surfaceof the main wall 51. The bias rubber 62 is provided between one of thelong side surfaces of the piezoelectric element unit 40 and the longside wall 54 of the case 5. The bias rubber 62 is in contact with notonly the actuator body 4 and the long side wall 54 but also the innersurface of the main wall 51.

Electrodes 51 a are formed on parts of the inner surface of the mainwall 51 in contact with the support rubbers 61 and the bias rubber 62(only one electrode in contact with the bias rubber 62 is shown in thefigure). These electrodes are in conduction with terminal electrodes(not shown) formed on the outer surface of the main wall 51,respectively.

Each of the support rubbers 61 is substantially in the form of arectangular parallelepiped and made of electrically conductive rubberprepared by mixing metal particles in silicone rubber. The supportrubbers 61 elastically support the actuator body 4 and bias the actuatorbody 4 in the lengthwise direction of the actuator body 4. At the sametime, the support rubbers 61 bring the external electrodes 46 and 47 ofthe piezoelectric element unit 40 into electrical conduction with theelectrodes formed on the parts of the inner surface of the main wall 51on the short sides thereof in electrical conduction with the terminalelectrodes.

Just like the support rubbers 61, the bias rubber 62 is substantially inthe form of a rectangular parallelepiped and made of electricallyconductive rubber prepared by mixing metal particles in silicone rubber.The bias rubber 62 is adapted to bias the actuator body 4 in thewidthwise direction of the actuator body 4 (the biasing direction is thewidthwise direction). At the same time, the bias rubber 62 brings theexternal electrode 45 of the piezoelectric element unit 40 and theelectrode 51 a of the main wall 51 into electrical conduction.

With this configuration, feeding to the piezoelectric element unit 40 isachieved by feeding to the terminal electrodes formed on the outersurface of the case 5.

In the thus-configured ultrasonic actuator 2, the driver elements 49 arebrought into contact with the bottom surface of the stage 11 and thecase 5 is fixed to the base (not shown). To be more specific, theultrasonic actuator 2 is arranged such that the widthwise direction ofthe piezoelectric element unit 40 is orthogonal to the bottom surface ofthe stage 11 and the lengthwise direction of the piezoelectric elementunit 40 is parallel to the bottom surface of the stage 11 and the rails12. In other words, the ultrasonic actuator 2 is arranged such that thedirection of the bending vibration of the piezoelectric element unit 40is orthogonal to the bottom surface of the stage 11 and the direction ofthe longitudinal vibration of the piezoelectric element unit 40 isparallel to the rails 12.

At the same time, the bias rubber 62 is compressed and deformed and thedriver elements 49 are biased toward the stage 11 by the elastic forceof the bias rubber 62. The biasing force of the ultrasonic actuator 2 onthe stage 11 is determined by the elastic force of the bias rubber 62.

Referring to FIG. 1, the aforementioned temperature sensor 81 isattached to part of the base near the ultrasonic actuator 2 to measurethe temperature of the ultrasonic actuator 2 (specifically, thetemperature in the vicinity of the ultrasonic actuator 2). Thetemperature sensor 81 functions as a temperature detector.

The condensation sensor 82 is also attached to part of the base near theultrasonic actuator 2 just like the temperature sensor 81 and detectswhether or not the condensation has occurred on the ultrasonic actuator2 (specifically, in the vicinity of the ultrasonic actuator 2). Thecondensation sensor 82 functions as a condensation detector.

The position detection sensor 83 detects the present position of thestage 11.

The control unit 7 includes a microcomputer 71, a frequency generator 72and a drive circuit 73 as shown in FIG. 9.

The microcomputer 71 receives an externally applied operation commandand detection signals from the temperature sensor 81, the condensationsensor 82 and the position detection sensor 83 and outputs a controlsignal to the frequency generator 72 and the drive circuit 73.Specifically, the microcomputer 71 receives the externally appliedoperation command and the detection signals from the temperature sensor81, the condensation sensor 82 and the position detection sensor 83.Based thereon, the microcomputer 71 determines the frequency, voltagevalue and a difference between phases of two AC voltages to be appliedto the ultrasonic actuator 2. Then, the microcomputer 71 outputs acontrol signal corresponding to the determined frequency to thefrequency generator 72 and a control signal corresponding to thedetermined voltage value and the phase difference to the drive circuit73. The determination of the frequency, the voltage value and the phasedifference of the two AC voltages by the microcomputer 71 will bedescribed later.

The frequency generator 72 receives the control signal from themicrocomputer 71 and produces an electrical signal having the frequencydetermined by the microcomputer 71, which is output to the drive circuit73.

The drive circuit 73 receives the control signal from the microcomputer71, amplifies the electrical signal input from the frequency generator72 up to the voltage value determined by the microcomputer 71 andoutputs two AC voltages having the phase difference determined by themicrocomputer 71 to the ultrasonic actuator 2.

The control by the control unit 7 is now explained in more detail.

The control unit 7 (specifically, the microcomputer 71) drives andcontrols the ultrasonic actuator 2 by switching between a normaloperation mode in which the ultrasonic actuator 2 is normally operatedto move the stage 11 (normal operation mode) and a heating mode in whichthe piezoelectric element unit 40 is heated to remove the condensationon the ultrasonic actuator 2 (heating mode). To be more specific, thecontrol unit 7 receives the detection signal from the condensationsensor 82 to judge whether or not the condensation has occurred on theultrasonic actuator 2. If a judgment that the condensation has notoccurred is made, the control unit 7 enters the normal operation mode.On the other hand, if it is judged that the condensation has occurred,the control unit 7 enters the heating mode.

In the normal operation mode, the longitudinal and bending vibrationsoccur in harmony in the piezoelectric element unit 40 as described abovesuch that the driver elements 49 make the circular motion as shown inFIGS. 8A to 8D and the stage 11 is moved. Specifically, themicrocomputer 71 determines the frequency, the voltage value and thedifference between phases of two AC voltages to be applied to theultrasonic actuator 2 based on the present position of the stage 11calculated from the detection result of the position detection sensor 83and the operation command. For example, in the normal operation mode,the microcomputer 71 sets the frequency of the AC voltages to beslightly higher than the common resonance frequency of the longitudinalvibration in the lengthwise direction of the piezoelectric element unit40 and the bending vibration and sets the phase difference between thetwo AC voltages to 90° or −90° depending on the moving direction of thestage 11. Then, the microcomputer 71 determines the voltage value of theAC voltages based on the distance to the target position of the stage 11obtained from the present position of the stage 11 and the operationcommand. Not only the voltage value, the frequency and the phasedifference may be changed based on the distance to the target positionof the stage 11.

The reason why the applied frequency is slightly higher than the commonresonance frequency of the longitudinal vibration in the lengthwisedirection of the piezoelectric element unit 40 and the bending vibrationis applied is as follows. If the piezoelectric element unit 40 vibratesat the common resonance frequency, the amplitude of the vibrationincreases. At the same time, the impedance of the piezoelectric elementunit 40 is extremely reduced and excessive current flows. This mayresult in abnormal heat generation and thermal damage. Therefore, thefrequency slightly shifted from the resonance frequency is used in thenormal operation mode.

The piezoelectric element unit 40 during the resonance shows anelectrical equivalent circuit as shown in FIG. 10, i.e., equivalentinductance L1, equivalent capacity C1 and resonant resistance R1 areconnected in parallel to normal capacitance C0 of the piezoelectricelement unit 40. The resonance is caused by the equivalent inductance L1and the equivalent capacity C1, while only the resonance resistance R1exists as a resistance load. In general, C0 is several 10 nF and the R1value during the resonance is about several Ω. Therefore, when adielectric body is driven at several tens kHz to several hundreds kHz,excessive current flows during the resonance.

For example, if the piezoelectric element unit 40 is designed such thatthe first mode of longitudinal vibration in the lengthwise direction ofthe piezoelectric element unit 40 and the second mode of bendingvibration have the same resonance frequency, the impedance is extremelyreduced at the common resonance frequency of the first mode oflongitudinal vibration in the lengthwise direction and the second modeof bending vibration as shown in FIG. 11. At the same time, theimpedance extremely increases at the frequency slightly higher than thecommon resonance frequency (antiresonance frequency). The abruptincrease in impedance is also observed at the resonance frequency of theother modes of vibration. For example, the impedance abruptly increasesat the resonance frequency of the first mode of longitudinal vibrationin the thickness direction (stacking direction) of the piezoelectricelement unit 40. The variation in impedance at the resonance frequencyof the other modes of vibration is not shown.

As a result, current flowing in the piezoelectric element unit 40abruptly increases at the common resonance frequency of the first modeof longitudinal vibration in the lengthwise direction of thepiezoelectric element unit 40 and the second mode of bending vibrationas shown in FIG. 12. The current also increases abruptly at theresonance frequency of the longitudinal vibration in the thicknessdirection of the piezoelectric element unit 40.

If the ultrasonic actuator 2 is actuated at an AC voltage having afrequency slightly higher than the common resonance frequency of thelongitudinal vibration in the lengthwise direction of the piezoelectricelement unit 40 and the bending vibration, the longitudinal vibration inthe lengthwise direction of the piezoelectric element unit 40 and thebending vibration occurs in harmony, the piezoelectric element unit 40is less likely to generate heat and the power consumption is reduced.

Next, how the ultrasonic actuator 2 controlled in the normal operationmode drives the stage 11 will be explained.

As described above, when the actuator body 4 causes composite vibrationof the longitudinal and bending vibrations, the driver elements 49 makea substantially elliptical motion on the plane including the lengthwiseand widthwise directions of the piezoelectric element unit 40. Thedriver elements 49 periodically come in and out of contact with thestage 11 to move the stage 11 in the lengthwise direction of thepiezoelectric element unit 40 by friction. Depending on the degree ofthe circular motion, the driver elements 49 do not come out of contactwith the stage 11 but repeatedly increase and decrease the frictionagainst the stage 11.

Specifically, when the piezoelectric element unit 40 stretches in thelengthwise direction (the direction of the longitudinal vibration), oneof the driver elements 49 (e.g., left one in FIG. 13) moves in thelengthwise direction to pass closer to the stage 11 than to thepiezoelectric element unit 40 in the widthwise direction (the directionof the bending vibration) as shown in FIG. 13B and applies increasedfriction against the stage 11. With this friction, the stage 11 isdisplaced toward the moving direction of the one of the driver elements49 in the lengthwise direction (to the left in FIG. 13). At the sametime, the other driver element 49 (right one in FIG. 13) moves in thelengthwise direction opposite from the moving direction of the formerdriver element 49 to pass closer to the piezoelectric element unit 40than to the stage 11 in the widthwise direction (to be spaced from thestage 11). Therefore, the friction between the driver element 49 and thestage 11 is reduced or zero. Thus, the latter driver element 49 haslittle influence on the displacement of the stage 11.

In the case where the piezoelectric element unit 40 contracts in thelengthwise direction, the latter driver element 49 (right one in FIG.13) moves in the lengthwise direction to pass closer to the stage 11than to the piezoelectric element unit 40 in the widthwise direction asshown in FIG. 13C and applies increased friction against the stage 11.With this friction, the stage 11 is displaced toward the movingdirection of the latter driver element 49 in the lengthwise direction(to the left in FIG. 13). At the same time, the former driver element 49(left one in FIG. 13) moves in the lengthwise direction opposite fromthe moving direction of the latter driver element 49 to pass closer tothe piezoelectric element unit 40 than to the stage 11 in the widthwisedirection. Therefore, the friction between the former driver element 49and the stage 11 is reduced or zero. Thus, the former driver element 49has little influence on the displacement of the stage 11. The directionof the displacement in this case is the same as the moving direction ofthe stage 11 driven by the former driver element 49 when thepiezoelectric element unit 40 is stretched.

In this manner, the two driver elements 49 alternately allow the stage11 to move in the same direction (to the left in FIG. 13) while theirphases are shifted from each other by 180°. If the AC voltages withtheir phases shifted from each other by −90° are applied to the externalelectrodes 46 and 47, the driver elements 49 deliver the driving forcein the opposite direction such that the stage 11 moves in the oppositedirection (to the right in FIG. 13).

The travel distance of the stage 11 is adjusted by controlling at leastone of the voltage value, the frequency and the feeding period of the ACvoltages applied to the external electrodes 46 and 47. Alternately, theadjustment is carried out by changing the value of phase differencebetween the AC voltages applied to the external electrodes 46 and 47,for example, other than 90°.

As the ultrasonic actuator 2 is arranged to be biased toward the stage11 as described above, the biasing force keeps the stage 11 still whenthe stage 11 is not driven. That is, the ultrasonic actuator 2 fordriving the stage 11 has a function of keeping the stage 11substantially still and there is no need of providing an additionalmechanism for keeping the stage 11 substantially still (hereinafter,this function is referred to as a self-keeping function).

The ultrasonic actuator 2 is able to produce high torque at a relativelylow speed and keep the stage still by static friction in a non-operatingstate.

In the heating mode, the piezoelectric element unit 40 vibrates at aresonance frequency of the longitudinal vibration in the thicknessdirection (stacking direction). If the shape of the piezoelectricelement unit 40 is designed such that the resonance frequency of thelongitudinal vibration in the thickness direction varies from that ofthe longitudinal vibration in the lengthwise direction and the bendingvibration and an AC voltage having the resonance frequency of thelongitudinal vibration in the thickness direction is applied to thepiezoelectric element unit 40, the piezoelectric element unit 40 isresonated in the thickness direction. As a result, the longitudinalvibration in the lengthwise direction and the bending vibration arereduced as small as negligible.

To be more specific, in the heating mode, the microcomputer 71 sets thefrequency of the AC voltage to the resonance frequency of the first modeof longitudinal vibration in the thickness direction of thepiezoelectric element unit 40, sets the phases of the two AC voltagesequal and selects a predetermined voltage value of the AC voltage. Thatis, the control unit 7 outputs the two AC voltages having the samephases at the resonance frequency of the longitudinal vibration in thethickness direction to the ultrasonic actuator 2.

Then, the piezoelectric element unit 40 repeats expansion andcontraction in the thickness direction. As the center of the driverelements 49 in the thickness direction is aligned with the center of thepiezoelectric element unit 40 in the thickness direction, the driverelements 49 are not displaced in the thickness direction, but justexpand and contract in the thickness direction. The expansion andcontraction of the driver elements 49 in the thickness direction aresymmetrical with respect to the center of the driver elements 49 in thethickness direction. That is, the driver elements 49 do not deliver thedriving force in the moving direction of the stage 11 (i.e., thelengthwise direction of the piezoelectric element unit 40) and in thethickness direction of the piezoelectric element unit 40.

As the piezoelectric element unit 40 vibrates at the resonancefrequency, the amplitude of the vibration increases as described above.At the same time, the impedance of the piezoelectric element unit 40 isextremely reduced to allow excessive current to flow and thepiezoelectric element unit 40 is heated. The heating mode makes use ofthe excessive heat of the piezoelectric element unit 40 to remove thecondensation on the ultrasonic actuator 2. Specifically, thepiezoelectric element unit 40 vibrates at the resonance frequency toraise the temperature of the piezoelectric element unit 40, or theultrasonic actuator 2, such that the condensation on the ultrasonicactuator 2 is removed.

In the heating mode, the ultrasonic actuator 2 is resonated in avibration mode in which the driving force is not output to the stage 11(i.e., the first mode of longitudinal vibration in the thicknessdirection of the piezoelectric element unit 40). At the same time, thepiezoelectric element unit 40 generates heat and the condensation on theultrasonic actuator 2 is removed by the heat.

The piezoelectric element unit 40 is heated only when the temperature ofthe piezoelectric element unit 40 is not higher than a firstpredetermined temperature. To be more specific, the control unit 7receives the detection signal of the temperature sensor 81 andcalculates the temperature of the piezoelectric element unit 40 based onthe detection signal. If the calculated temperature reaches the firstpredetermined temperature, the current flow to the piezoelectric elementunit 40 is stopped to terminate the heating of the piezoelectric elementunit 40. After that, when the temperature of the piezoelectric elementunit 40 decreases to a second predetermined temperature lower than thefirst predetermined temperature, the current is allowed to flow to thepiezoelectric element unit 40 again. In this manner, the piezoelectricelement unit 40 is heated in the temperature range not lower than thesecond predetermined temperature and not higher than the firstpredetermined temperature. When the temperature of the piezoelectricelement unit 40 reaches the first predetermined temperature, the heatingmay be restrained by changing the voltage value, current value orfrequency of the AC voltage instead of stopping the current flow to thepiezoelectric element unit 40. The first predetermined temperature ispreferably set to a temperature at which the polarization characteristicof the piezoelectric layers 41 of the piezoelectric element unit 40 doesnot deteriorate.

The heating mode is continued based on the detection signal of thecondensation sensor 82 until the condensation on the ultrasonic actuator2 is removed. When a judgment that the condensation has been removed ismade based on the detection signal of the condensation sensor 82, thecontrol unit 7 switches the ultrasonic actuator 2 from the heating modeto the normal operation mode.

According to Embodiment 1, the control unit 7 drives the ultrasonicactuator 2 in the normal operation mode when the condensation is notgenerated on the ultrasonic actuator 2 such that the stage 11 is moved.If the condensation occurs on the ultrasonic actuator 2, the ultrasonicactuator 2 is heated in the heating mode to remove the condensation.Thus, even in an environment where the condensation is likely to occur,the condensation on the ultrasonic actuator 2 is eliminated and themalfunction of the ultrasonic actuator 2 is prevented.

Since the condensation is removed by heat generated by the piezoelectricelement unit 40 itself, it is not necessary to provide the drive unit 1with an additional mechanism for removing the condensation. This makesit possible to prevent an increase in size, complexity and cost of thedrive unit 1.

In the heating mode, the control unit 7 monitors the temperature of thepiezoelectric element unit 40 to control the temperature of thepiezoelectric element unit 40 within the predetermined range. Thus,breakage of the piezoelectric element unit 40 is less likely to occur.

According to Embodiment 1, since the piezoelectric element unit 40 isheated in the heating mode at the resonance frequency of the first modeof longitudinal vibration in the thickness direction, the piezoelectricelement unit 40 does not vibrate in the lengthwise direction of thepiezoelectric element unit 40 which is the moving direction of the stage11, but vibrates in the thickness direction thereof. Therefore, thestate of the stage 11 is hardly affected, i.e., the piezoelectricelement unit 40 is heated while the position of the stage 11 is keptunchanged. If the piezoelectric element unit 40 vibrates in the firstmode of longitudinal vibration in the thickness direction and the centerof the driver elements 49 in the thickness direction is aligned with thecenter of the piezoelectric element unit 40 in the thickness direction,the driver elements 49 are not displaced in the thickness direction butonly expand or contract with respect to the center of the piezoelectricelement unit 40. Therefore, the friction between the driver elements 49and the stage 11 caused by the expansion and contraction is canceled inthe thickness direction and the force caused by the friction is notapplied to the stage 11.

If the driver elements 49 are configured as spherical elements to bringthem into point contact with the stage 11 and the driver elements 49 arearranged at the center of the piezoelectric element unit 40 in thethickness direction, the point of contact between each of the driverelements 49 and the stage 11 is not displaced even if the piezoelectricelement unit 40 vibrates in the first mode of longitudinal vibration inthe thickness direction. Therefore, the driver elements 49 do notgenerate force by friction in the thickness direction. Thus, thepiezoelectric element unit 40 is heated without any force applied to thestage 11 (i.e., without any net force).

As described later in Embodiment 2, the driver elements 49 may beconfigured to vibrate in such a mode of vibration that they do not applythe driving force to the stage 11 in the heating mode. If two or moredriver elements 49 are in contact with the stage 11 as described inEmbodiment 1, the driving force may slightly be applied to the stage 11depending on the difference between the driver elements 49 in state ofcontact with the stage 11 and the misalignment of the driver elements 49with respect to the actuator body 4. However, according to the presentembodiment, the vibration direction of the piezoelectric element unit 40in the heating mode is the thickness direction of the piezoelectricelement unit 40 orthogonal to the moving direction of the stage 11.Therefore, the difference between the driver elements 49 in state ofcontact with the stage 11 and the misalignment of the driver elements 49with respect to the piezoelectric element unit 40 are negligible.

Embodiment 2

A drive unit according to Embodiment 2 of the invention will bedescribed.

The drive unit of Embodiment 2 is configured the same as the drive unit1 of Embodiment 1, but it is controlled in a different manner in theheating mode.

To be more specific, in the heating mode, the control unit 7 sets thefrequency of the AC voltage applied to the piezoelectric element unit 40not to the resonance frequency of the longitudinal vibration in thethickness direction of the piezoelectric element unit 40, but to theresonance frequency of the first mode of longitudinal vibration in thelengthwise direction of the piezoelectric element unit 40 (in thepresent embodiment, this is the same as the resonance frequency of thesecond mode of bending vibration). Further, the phases of the ACvoltages applied to the external electrodes 46 and 47 are not shiftedfrom each other by 90° but set equal. As a result, the four areascorresponding to the four electrodes of the piezoelectric element unit40 expand and contract at the same time and the piezoelectric elementunit 40 is substantially induced to make only longitudinal vibration inthe lengthwise direction as shown in FIG. 6.

The driver elements 49 are arranged in symmetry with respect to astraight line orthogonal to the stage 11 and passing the center of thepiezoelectric element unit 40 in the lengthwise direction, which is thenode of the longitudinal vibration in the lengthwise direction.Therefore, the driver elements 49 vibrate symmetrically in thelengthwise direction with respect to the center of the piezoelectricelement unit 40 in the lengthwise direction when the piezoelectricelement unit 40 vibrates in the first mode of longitudinal vibration inthe lengthwise direction. As a result, the frictions applied to thestage 11 by the vibrating driver elements 49 cancel each other, i.e.,the driver elements 49 do not deliver the driving force (i.e., netdriving force) to the stage 11. In this manner, the ultrasonic actuator2 is heated while the self-keeping function is exerted. The temperaturecontrol of the piezoelectric element unit 40 and the othercharacteristics of the drive unit of Embodiment 2 are the same as thoseof Embodiment 1.

The normal operation mode is also the same as described in Embodiment 1.

According to Embodiment 2, the control unit 7 operates the ultrasonicactuator 2 in the normal operation mode to move the stage 11 when thecondensation does not occur on the ultrasonic actuator 2. If thecondensation occurs on the ultrasonic actuator 2, the ultrasonicactuator 2 is operated in the heating mode such that the ultrasonicactuator 2 is heated to remove the condensation. Thus, even in theenvironment where the condensation is likely to occur, the condensationon the ultrasonic actuator 2 is eliminated and the malfunction of theultrasonic actuator 2 is prevented.

Further, since the AC voltages having the same voltage value and thesame phase are applied to the first feeding electrode layer 42 and thesecond feeding electrode layer 43 in the heating mode, the driverelements 49 vibrate in symmetry with respect to a straight line passingthe middle of a linear segment connecting the driver elements 49 andorthogonal to the moving direction of the stage 11. Therefore, thedriving forces applied by the driver elements 49 to the stage 11 canceleach other and the ultrasonic actuator 2 is heated with hardly anyinfluence on the state of the stage 11, i.e., the state of the stage 11is kept unchanged.

Thus, Embodiment 2 offers the same effect as that of Embodiment 1.

Embodiment 3

A drive unit according to Embodiment 3 of the invention will bedescribed.

The drive unit of Embodiment 3 is configured the same as the drive unit1 of Embodiment 1, but it is controlled in a different manner especiallyin the switching between the normal operation mode and the heating mode.

To be more specific, the drive unit 1 of Embodiment 3 always enters theheating mode when it is started. During the operation of the ultrasonicactuator 2 (some period after the start), the temperature of theultrasonic actuator 2 is relatively high due to the heat generation bythe piezoelectric element unit 40. Therefore, the condensation is lesslikely to occur. On the other hand, the temperature of the ultrasonicactuator 2 before the start may be lower than the ambient temperature tosuch an extent that the condensation occurs. Therefore, regardless ofthe presence or absence of the condensation, the ultrasonic actuator 2is heated in the heating mode when the drive unit 1 is actuated. In thismanner, the malfunction of the ultrasonic actuator 2 caused by thecondensation already exists before the start is surely prevented.

If the drive unit 1 is provided with a timer and the ultrasonic actuator2 is actuated within a certain period of time after the last operationis finished, the drive unit 1 may start not in the heating mode but inthe normal operation mode. Specifically, if the ultrasonic actuator 2 isactuated within the certain period of time after the last operation isfinished, the temperature of the ultrasonic actuator 2 is still high andthe possibility of the occurrence of the condensation is low.

According to Embodiment 3 in which the drive unit is controlled to startin the heating mode, the condensation sensor 82 is not necessary. As amatter of course, it is possible to provide the condensation sensor 82.Specifically, if the condensation sensor 82 is provided, thecondensation generated during the operation of the ultrasonic actuator 2is detected by the condensation sensor 82 and the drive unit 1 isswitched to the heating mode. In this manner, the malfunction of theultrasonic actuator 2 caused by the condensation is surely prevented notonly at the start of the drive unit 1 but also during the operationthereof.

Other Embodiments

The drive units of Embodiments 1 to 3 may be configured as follows.

According to the above-described embodiments, the ultrasonic actuator 2is configured such that the actuator body 4 vibrates in the first modeof longitudinal vibration in the lengthwise direction and the secondmode of bending vibration in harmony. However, the present invention isnot limited thereto. The ultrasonic actuator 2 may generate other kindsof vibrations and other modes. The ultrasonic actuator 2 may beconfigured in any way as long as it functions as a vibration actuator inwhich the actuator body 4 vibrates to deliver the driving force causedby the friction between the driver elements 49 and the stage 11.

The configuration of the ultrasonic actuator 2 is not limited to thatdescribed above. For example, instead of feeding the piezoelectricelement unit 40 via the support rubbers 61 and the bias rubber 62, leadsmay be connected to the piezoelectric element unit 40 to feed thepiezoelectric element unit 40. The node of the vibration of thepiezoelectric element unit 40 may be supported by an inelastic member.It is also possible to adopt an ultrasonic actuator 202 as shown in FIG.14 in which a single driver element 49 is provided on one of the shortside surfaces of the piezoelectric element unit 40. With thisconfiguration, the driver element 49 makes a circular motion as thepiezoelectric element unit 40 generates the composite vibration of thefirst mode of longitudinal vibration in the lengthwise direction and thesecond mode of bending vibration such that the stage 11 moves in thepredetermined moving direction (parallel to the widthwise direction) viathe friction between the driver element 49 and the stage 11. Further, inplace of the piezoelectric element unit 40 which functions as theactuator body 4, a structure prepared by adhering a piezoelectricelement on a metal substrate or a resonator made of metal with apiezoelectric element sandwiched between may be used. In such a case,the resonator including the piezoelectric element functions as theactuator body.

The drive units of the above-described embodiments are configured toexert the self-keeping function in the heating mode. However, thepresent invention is not limited thereto. For example, an AC voltagehaving a frequency slightly different from the common resonancefrequency of the first mode of longitudinal vibration in the lengthwisedirection of the piezoelectric element unit 40 and the second mode ofbending vibration is applied to the piezoelectric element unit 40 in thenormal operation mode, while an AC voltage having a frequency closer tothe common resonance frequency than to the former AC voltage is appliedto the piezoelectric element unit 40 in the heating mode. In the heatingmode, the phases of two driving voltages may be shifted from each othersubstantially by 180° such that the piezoelectric element unit 40generates only the longitudinal vibration. To be more specific, thepresent invention is not limited to the modes of vibration mentioned inthe embodiments. The drive unit of the invention may optionally beconfigured as long as the piezoelectric element is heated withsubstantially no influence on the movement of the stage 11 in thedriving direction.

Even if the self-keeping function is not exerted, the driver elements 49make the circular motion to drive the stage 11 in the normal operationmode while the heat generation of the piezoelectric element unit 40 keptsmall. Further, the piezoelectric element unit 40 is heated and thecondensation is removed in the heating mode while the driver elements 49make the circular motion. That is, at first in the heating mode, thestage 11 is not driven or moves at a speed lower than the normal speed.Then, after the stage 11 moves unstably for a while, the condensation isremoved and the stage 11 starts to move at the normal speed in a correctmanner. Although the stage 11 moves unstably in the heating mode, thecondensation is removed by heat generated by the piezoelectric elementunit 40 itself.

For heating the piezoelectric element unit 40 with the self-keepingfunction exerted, the piezoelectric element unit 40 of Embodiment 1 isresonated to make the longitudinal vibration in the thickness direction,while the piezoelectric element unit 40 of Embodiment 2 is resonated tomake the longitudinal vibration in the lengthwise direction. However,the present invention is not limited thereto. Specifically, thevibration of the piezoelectric element unit 40 occurs in athree-dimensional manner. Therefore, when the stage 11 is adapted tomove one-dimensionally, i.e., when the ultrasonic actuator 2 outputs thedriving force in one certain direction in a one-dimensional manner, thepiezoelectric element unit 40 is allowed to vibrate in the other twodirections. Further, when the stage 11 is adapted to movetwo-dimensionally, i.e., when the ultrasonic actuator 2 outputs thedriving forces in two directions in two-dimensional manner or twoultrasonic actuators 2 which output the driving force in a singledirection in one-dimensional manner, respectively, are used incombination, the piezoelectric element unit 40 is allowed to vibrate inthe remaining one direction. In this manner, the piezoelectric elementunit 40 is heated to remove the condensation with the self-keepingfunction is exerted.

In the above-described embodiments, the ultrasonic actuator 2 is fixedto the base and the driver elements 49 are brought into contact with themovable stage 11 and the ultrasonic actuator 2 is operated to drive thestage 11. However, as shown in FIG. 15, the ultrasonic actuator 2 may befixed to the stage. Specifically, a drive unit 301 includes rails 13fixed in parallel with each other on a base, a stage 14 slidablyattached to the rails 13 and an ultrasonic actuator 2. One of the rails13 is provided with an abutment 13 a fixed to the rail 13. The stage 14is provided with an actuator mount 14 a. A case 5 is mounted on theactuator mount 14 a of the stage 14 such that driver elements 49 of theultrasonic actuator 2 are in contact with the abutment 13 a of the rail13. When the ultrasonic actuator 2 is actuated in this state, the driverelements 49 deliver the driving force to the abutment 13 a. Then, theultrasonic actuator 2 vibrates relatively to the abutment 13 a in thelengthwise direction of the rails 13 because the abutment 13 a is fixed.As a result, the stage 14 joined with the case 5 via the actuator mount14 a is driven in the lengthwise direction of the rails 13.

In the embodiments described above, whether or not the condensation hasoccurred on the ultrasonic actuator 2 is detected by the condensationsensor 82. However, the invention is not limited thereto. For example,the condensation sensor may be replaced with a humidity sensor and thejudgment as to the presence of the condensation is determined based onthe detection results of the humidity sensor and the temperature sensor81. In this case, the humidity sensor and the temperature sensorfunction as a condensation detector.

As described above, with respect to a drive unit including a vibrationactuator using a piezoelectric element, the present invention is usefulfor improvement in performance of the interface at which friction driveoccurs.

It should be noted that the present invention is not limited to theabove embodiment and various modifications are possible within thespirit and essential features of the present invention. The aboveembodiment shall be interpreted as illustrative and not in a limitingsense. The scope of the present invention is specified only by thefollowing claims and the description of the specification is notlimitative at all. Further, it is also to be understood that all thechanges and modifications made within the scope of the claims fallwithin the scope of the present invention.

1. A drive unit including a vibration actuator using a piezoelectricelement comprising: a control section for controlling the vibrationactuator switchably between a normal operation mode in which thepiezoelectric element vibrates at a predetermined frequency to let thevibration actuator output a driving force, and a heating mode in whichthe piezoelectric element vibrates at a frequency different from thefrequency in the normal operation mode to heat the piezoelectricelement.
 2. The drive unit of claim 1 further comprising a temperaturedetector for detecting a value related to the temperature of thepiezoelectric element, wherein the control section allows heating of thepiezoelectric element in a temperature range not higher than apredetermined temperature based on the detection result of thetemperature detector in the heating mode.
 3. The drive unit of claim 1,wherein the control section in the normal operation mode allows thevibration actuator to vibrate in a predetermined vibration mode suchthat the vibration actuator outputs the driving force and the controlsection in the heating mode allows the vibration actuator to vibrate ina vibration mode different from that in the normal operation mode suchthat the piezoelectric element is heated while the vibration actuatordoes not output the driving force.
 4. The drive unit of claim 3, whereinthe vibration actuator is shaped to have a lengthwise direction, awidthwise direction and a thickness direction orthogonal to thelengthwise and widthwise directions, the control section allows thevibration actuator to make longitudinal vibration in the lengthwisedirection and bending vibration in the widthwise direction to let thevibration actuator output the driving force in the normal operation modeand the control section allows the vibration actuator to makelongitudinal vibration in the thickness direction without outputting thedriving force such that the piezoelectric element is heated in theheating mode.
 5. The drive unit of claim 1, further comprising acondensation detector for detecting whether or not condensation hasoccurred on the vibration actuator, wherein the control section entersthe heating mode when the condensation is detected by the condensationdetector.
 6. The drive unit of claim 1, wherein the control sectionenters the heating mode when it is started.
 7. The drive unit of claim6, wherein the control section enters the normal operation mode when itis restarted within a predetermined period of time after last operationis finished.
 8. The drive unit of claim 2, further comprising acondensation detector for detecting whether or not condensation hasoccurred on the vibration actuator, wherein the control section entersthe heating mode when the condensation is detected by the condensationdetector.
 9. The drive unit of claim 3, further comprising acondensation detector for detecting whether or not condensation hasoccurred on the vibration actuator, wherein the control section entersthe heating mode when the condensation is detected by the condensationdetector.
 10. The drive unit of claim 4, further comprising acondensation detector for detecting whether or not condensation hasoccurred on the vibration actuator, wherein the control section entersthe heating mode when the condensation is detected by the condensationdetector.
 11. The drive unit of claim 2, wherein the control sectionenters the heating mode when it is started.
 12. The drive unit of claim3, wherein the control section enters the heating mode when it isstarted.
 13. The drive unit of claim 4, wherein the control sectionenters the heating mode when it is started.
 14. The drive unit of claim5, wherein the control section enters the heating mode when it isstarted.